Enumerations

AutoAlignCmd

Bases: Enum

Specifies an algorithm for performaing auto alignment.

Attributes:

Name	Type	Description
AutoDieSize	0	Perform auto alignment. Determine die size with zero prior knowledge.
UpdateDieSize	1	Perform auto alignment. Update die size based on current value.
TwoPt	2	Use Two-Point alignment algorithm.

AutoFocusAlgorithm

Bases: Enum

A list of different AutoFocus algorithms.

Attributes:

Name	Type	Description
Gradient	0	Gradient Engery
Bandpass	1	Bandpass Filter
Difference	2	Difference
AutoCorrelation	3	Auto Correlation

AutoFocusCmd

Bases: Enum

A list of different AutoFocus functions.

Attributes:

Name	Type	Description
Calibration	0	Execute focus calibration.
Focus	1	Measure Focus curve and determine maximum.
GoTo	2	Simply move the scope to distance from the wafer that is known to be in focus.

AxisOrient

Bases: Enum

Represents an axis orientation.

Thie enumeration is mostly used to describe axis orientations on the computer screen. For instance the axis orientation of the wafer map.

Attributes:

Name	Type	Description
DownRight	0	Y axis pointing down; X axis pointing right.
DownLeft	1	Y axis pointing down; X axis pointing left.
UpRight	2	Y-axis pointing up; X axis pointing right.
UpLeft	3	Y-axis pointing up; X axis pointing left.

BinQuality

Bases: Enum

An enumerator dor defining the quality parameter of a certain bin code.

Attributes:

Name	Type	Description
All	0	Select dies and subsites.
DiesOnly	1	Select dies only.
SubsitesOnly	2	Select subsites only.

BinSelection

Bases: Enum

An enumerator for selecting dies for binning.

Attributes:

Name	Type	Description
All	0	Select dies and subsites.
DiesOnly	1	Select dies only.
SubsitesOnly	2	Select subsites only.

CameraMountPoint

Bases: Enum

Available camera mount points.

A camera mount point is a physical position in the prober where a camera can be located. SENTIO refers to its camera via the camera mount point.

Attributes:

Name	Type	Description
Scope	0	The downward looking microscope camera.
Scope2	1	Second scope camera. This camera is only used by IMag to provide a wider field of view in addition to the scope camera.
Chuck	2	The upward looking chuck camera.
OffAxis	3	Downward looking platen camera.
Vce	4	First Vce camera.
Vce2	5	Second Vce camera.

ChuckPositionHint

Bases: Enum

Position hint for the chuck stage.

Attributes:

Name	Type	Description
Center	0	Chuck is at Center Position
FrontLoad	1	Chuck is at Front Load Position
SideLoad	2	Chuck is at Side Load Position

ChuckSite

Bases: Enum

An enumeration containing chuck sites.

A chuck site is a physical position that is attached to the chuck and is moving together with the chuck.

Attributes:

Name	Type	Description
Wafer	0	The wafer site. This is where your wafer is supposed to be.
AuxRight	1	Right auxilliary site (if available)
AuxLeft	2	Left auxilliary site (if available)
AuxRight2	3	Secondary right auxilliary site (if available)
AuxLeft2	4	Secondary left auxilliary site (if available)
ChuckCamera	5	The chuck camera

ChuckThetaReference

Bases: Enum

Reference to use for chuck theat motions.

Attributes:

Name	Type	Description
Zero	0	Use zero of the theta axis.
Site	1	Use the trained site of "home" angle as the reference.
Relative	2	Use the current theta position as reference.

ChuckXYReference

Bases: Enum

Defines a reference for chuck xy motions.

Attributes:

Name	Type	Description
Zero	0	Use absolute chuck coordinates.
Home	1	Use home position as reference.
Relative	2	Use curent chuck position as reference.
Center	3	Use chuck center position as reference.
User	4	Use user defined coordinate system.

ChuckZReference

Bases: Enum

Defines a position reference for chuck z-motions.

Attributes:

Name	Type	Description
Zero	0	Use absolute chuck z coordinates with respect the the physical axis zero positon.
Relative	1	Use relative chuck z coordinated with respect to the current position.
Contact	2	Use relative chuck z coordinated with respect to the chucks contact height.
Hover	3	Use relative chuck z coordinated with respect to the chucks hover height.
Separation	4	Use relative chuck z coordinated with respect to the chucks separation height.

ColorScheme

Bases: Enum

The color scheme used by the wafer map.

Attributes:

Name	Type	Description
ColorFromBin	0	The color of a die is determined by the bin code of the die.
ColorFromValue	1	The color of the die is determined by a floating point value attached to a die.

CompensationMode

Bases: Enum

A list with available compensation modes.

Attributes:

Name	Type	Description
Lateral	0	Lateral (XY) compensation.
Vertical	1	Vertical (Z) compensation.
Both	2	Both lateral and vertical compensation.
ProbeCard	3	Probe card compensation.
MapScan	4	MapScan compensation.
Topography	5	Topography compensation.

CompensationType

Bases: Enum

A list of compensation types.

Attributes:

Name	Type	Description
DieAlign	0
Topography	1	Vertical (Z) compensation.
MapScan	2	Both lateral and vertical compensation.
AlignDie	3	Probe card compensation.
SkateDetection	4	MapScan compensation.

DefaultPattern

Bases: Enum

A list of slots for visual patterns used by SENTIO.

Each pattern is used for a specific purpose internally.

Attributes:

Name	Type	Description
Align	0	The pattern used for wafer alignment.
Home	1	Pattern used for finding the home position
DieAlignPos1	3	First pattern used for the die alignment. (on diced and taped wafers)
DieAlignPos2	4	Second pattern used for the die alignment. (on diced and taped wafers)
TwoPoint	5	Pattern for Two-Point alignment
Vce	6	Pattern used for VCE contact height detection.
Ptpa	7	A pattern used for probe to pad alignment.

DetectionAlgorithm

Bases: Enum

Specifes one of several of SENTIO's internal detection algorithms.

Not all versions of SENTIO support all algorithms. The most current versions of SENTIO have eliminated all models except for the ones based on deep learning.

Those new Standard models detect multiple class of objects with far greater reliability than the outdated models based on haar cascades.

Attributes:

Name	Type	Description
Keypoint	0	A Keypoint / ORB detector.
ProbeDetector	1	Deep learning based AI model trained on various types of probe tips.
WaferDetector	2	Deep learning based AI model trained on wafer structures.

DetectionCoordindates

Bases: Enum

Specifies the coordinate system used for reporting box detections.

Used by SENTIO's built in DetectionAlgorithm

Attributes:

Name	Type	Description
Image	0	Use image coordinates. Results are returned as pixel coordinates.
Fov	1	Coordinates are in micrometer relative to the center of the field of view.
Roi	2	Coordinates are in micrometer relative to the center of the region of interest.

DialogButtons

Bases: Enum

A list of buttons that can be used in SENTIO's dialogs.

Attributes:

Name	Type	Description
Ok	1	An Ok button.
Yes	2	A Yes button.
No	3	A No button.
Cancel	4	A Cancel button.
OkCancel	5	Both the Ok and the Cancel button.
YesNo	6	Both a Yes and a No button.
YesCancel	7	Yes and cancel button.
YesNoCancel	8	Yes, No and Cancel button.

DieCompensationMode

Bases: Enum

Represents a compensation mode used by SENTIO.

The compensation mode is a selector that defines what principal type of compensation shall be used.

Attributes:

Name	Type	Description
Lateral	0	Use lateral compensation.
Vertical	1	Use vertical compensation.
Both	2	Use both lateral and vertical compensation.
ProbeCard	3	Use probe card compensation.
SkateDetection	4	Use skate detection

DieCompensationType

Bases: Enum

Compensation Type.

Attributes:

Name	Type	Description
DieAlign	0	Die Alignment.
MapScan	1	MapScan scans the wafer once and created a x,y compensation table for later use.
Topography	2	Topography scans the height og the wafer on chuck and created a height map.

DieNumber

Bases: Enum

Specifies how dies are numbered.

Attributes:

Name	Type	Description
Present	1	Number only dies that are present on the wafer.
Selected	2	Number only dies that are selected for test.

FindPatternReference

Bases: Enum

Reference point for coordinates than returning a pattern position.

Attributes:

Name	Type	Description
DieHome	0	Use Die Home position as reference.
CenterOfRoi	1	Use Center of ROI as reference.

LoadPosition

Bases: Enum

An enumeration containing the possible load positions.

Not all load positions are available on all probe stations.

Attributes:

Name	Type	Description
Front	0	The Front Load position. All probe station have a front load position.
Side	1	The Side Load position. The side load position is optional and only present on systems with a side loader, a cassette loader or a wafer wallet.

LoaderStation

Bases: Enum

An enumeration containing loader stations.

Attributes:

Name	Type	Description
Cassette1	0	First cassette station.
Cassette2	1	Second cassette station.
PreAligner	2	Prealigner Station for wafer prealignment.
Chuck	3	The chuck station.
ForkA	4	Robot fork A
ForkB	5	Roboit fork B
WaferWallet	6	5 slow wafer wallet station
IdReader	7	Id-reader station.

Module

Bases: Enum

An enumerator containing the names of all SENTIO modules.

Module availability is determined by the specific type of probe station. All probe stations have the dashboard, setup and service modules. Most likely wafermap and Vision module will also be present (unless you have a purely manual station)

Attributes:

Name	Type	Description
Wafermap	0	The wafermap module. This module is used for wafer alignment and wafer mapping.
Vision	1	The vision module. This module is used for die alignment and wafer inspection.
Setup	2	The setup module. This module is used for setting up the probe station.
Service	3	The service module. This module is used for service and maintenance.
Qalibria	4	The Qalibria module. This module is used for Qalibria integration.
AuxSites	5	The aux site module. This module is used for auxilliary site integration.
Loader	6	The loader module. This module is used for loader integration.
Dashboard	7	The dashboard module. This module is used for dashboard integration.

OrientationMarker

Bases: Enum

Defines the wafers orientation marker.

Orientation markers can either be a notch or a flat in the wafer. The orientation marker is used by the prealigner to detect the wafer position.

Today mostly notches are used ar orientation markes as they reduce the waste of wafer space.

Attributes:

Name	Type	Description
Notch	0	Wafer uses a notch.
Flat	1	Wafer uses a flat.

PoiReferenceXy

Bases: Enum

Referenc position for points of interest.

Each point of interest can either be defines with respect to the center of the stage. Or with respect to the center of the die.

Attributes:

Name	Type	Description
DieCenter	0	Use die center as the position reference.
StageCenter	1	Use stage center as the position reference.

ProbeSentio

Bases: Enum

An enumeration containing a list of position for motorized probes.

Attributes:

Name	Type	Description
East	0	Probe is on the right side of the chuck.
West	1	Probe is on the left side of the chuck.
North	2	Probe is at the back side of the prober.
South	3	Probe is on the front side of the prober.

ProbeXYReference

Bases: Enum

Position reference for mororized probe movements.

Attributes:

Name	Type	Description
Zero	0	Use absolute probe coordinates.
Home	1	Use coordinates with respect to the probe home position.
Current	2	Use coordinates with respect to the current probe position.

ProbeZReference

Bases: Enum

Position reference for probe z motions.

Attributes:

Name	Type	Description
Zero	0	Use absolute probe coordinates.
Current	1	Use coordinates with respect to the current probe position.
Contact	2	Use coordinates with respect to the contact height.
Separation	3	Use coordinates with respect to the separation height.

ProjectFileInfo

Bases: Enum

An enumerator containing the different aspects of retrieving current project info.

Attributes:

Name	Type	Description
NameOnly	0	Return only the project name.
FullPath	1	Return the full path to the project file.

PtpaFindTipsMode

Bases: Enum

Specifies the mode used by ptpa tip finding.

Attributes:

Name	Type	Description
OnAxis	0	Use on axis tip finding.
OffAxis	1	Use off axis tip finding.

PtpaType

Bases: Enum

Defines the type of Probe to Pad Alignment used by SENTIO.

Attributes:

Name	Type	Description
OffAxis	0	Use off-axis PTPA with the platen camera and the chuck camera looking up to the probe tips.
OnAxis	1	Use on axis PTPA with the scope camera looking down on the probe tips.

RemoteCommandError

A list of possible error codes used by SENTIO.

This list may not contain the full list of codes used by SENTIO due to the fact that SENTIO is a moving target and new error codes may be added or removed.

Have a look at the remote command specification to see which codes are supported by your version.

Attributes:

Name	Type	Description
NoError	0	No error occured.
InternalError	1	An internal error occured in SENTIO. This is not supposed to happen and you can probably not fix the issue on your own. Please contact SENTIO support.
ExecutionError	2	A generic execution error. This is the most widely used error code to signal remote command failure.
CommandHandlerNotFound	3	A command handler for a certain subsystem of SENTIO was not found. This may happen when sending commands to a SENTIO module that is not available on a given machine.
InvalidCommand	4	not used by SENTIO's native remote command set.
InvalidCommandFormat	5	not used by SENTIO's native remote command set.
InvalidParameter	6	A remote command parameter is incoreect.
InvalidNumberOfParameters	7	The number of submitted remote command parameters is incorect.
ArgumentOutOfBounds	8	A submitted parameter exceeds the range of allowed values.
FileNotFound	9	A file that was supposed to be loaded by SENTIO was not found.
InvalidFileFormat	10	not used by SENTIO's native remote command set.
EndOfRoute	11	Stepping reached the end of the route.
InvalidOperation	12	The requested operation is not allowed in the current state.
NotSupported	13	The requested operation is not supported by the current version of SENTIO.
SubsiteNotRoutable	14	The requested subsite is not routable.
ProjectRequired	15	A requested operation require an active project.
Unused	16	This error code is unused.
PrealignmentFailed	17	Prealignment failed.
HomePositionNotSet	18	The home position is not set.
Timeout	19	A command or operation timed out.
PatternNotTrained	20	A required pattern is not trained
PatternNotFound	21	A pattern could not be found
TooManyPatternsFound	22	Too many patterns were found
ContactHeightNotSet	23	The contact height is not set.
AutoFocusFailed	24	Auto focus failed on the wafer.
TipFocusFailed	25	Auto focus failed on the tips.
TipNotFound	26	A tip could not be found.
OffsetOverTolerance	27	The offset is over tolerance.
CommandPending	30	Returned when the status of an async command is polled with query_command_status and the command is Running
AsyncCommandAborted	31	Returned when a async command was aborted prematurely
UnknownCommandId	32	Returned when an async command is queried but SENTIO does not know anything about this command id
CameraNotCalibrated	35	A camera required for a vision task is not calibrated
CameraDoesNotExist	36	A required camera is not installed in the system.
AlignAccuracyBad	37	Alignment accuracy over 10 µm
SteppingWithWrongZPosition	38	Stepping when Chuck is below Separation
FrontDoorOpen	60	The front load door is open
LoaderDoorOpen	61	The side door is open
FrontDoorLockFail	62	Front door lock cannot be engaged
LoaderDoorLockFail	63	Side door lock cannot be engaged
SlotOrStationOccupied	64	A slot or station that is the target of a wafer transfer is already occupied
SlotOrStationEmpty	65	A slot or station that is the origin of a wafer transfer does not have a wafer
ProbeBackDoorOpen	66	The probe back door is open
ProbeSideDoorOpen	67	The probe side door is open (Not loader door, only TS2500/SE has this door, the door near the probe back door)
VacuumFailed	68	Vacuum failed
LoaderTrayDoorOpen	69	The tray door is open
LoaderCassetteDoesNotExist	80	The cassette does not exist
LoaderSlotNumberError	81	The slot number is not correct
LoaderPreAlignerAngleError	83	The prealigner angle is not correct

RoutingPriority

Bases: Enum

Defines the stepping order.

Attributes:

Name	Type	Description
RowUniDir	0	Rows first always step in same direction.
ColUniDir	1	Columns first always step in same direction.
RowBiDir	2	Rows first. Step odd rows backwards.
ColBiDir	3	Columns first. Step odd columns backwards.

RoutingStartPoint

Bases: Enum

Defines the starting point for routing (stepping commands).

Attributes:

Name	Type	Description
UpperLeft	0	Stepping starts in upper left corner of the map.
UpperRight	1	Stepping starts in upper right corner of the map.
LowerLeft	2	Stepping stars in lower left corner of the map.
LowerRight	3	Stepping starts in lower right corner of the map.

ScopeXYReference

Bases: Enum

Position reference for scope motions.

Attributes:

Name	Type	Description
Zero	0	Use absolute scope coordinates.
Home	1	Use coordinates with respect to the scope home position.
Relative	2	Use coordinates with respect to the current scope position.

ScopeZReference

Bases: Enum

Scope z reference for scoep motions.

Attributes:

Name	Type	Description
Zero	0	Use absolute scope coordinates.
Relative	1	Use coordinates with respect to the current scope position.

SnapshotLocation

Bases: Enum

Specifies where a snapshot shall be saved.

Local = 1 class-attribute instance-attribute

The snapshot will be transferred to the PC that is running the python control script. This option only makes sense if the prober and the control PC are different.

Prober = 0 class-attribute instance-attribute

The snapshot is stored remotely on the prober PC that is executing SENTIO.

SnapshotType

Bases: Enum

Specifies the type of image snapshot to be taken

CameraRaw = 0 class-attribute instance-attribute

The snapshot is the raw image from the camera in original resolution

WithOverlays = 1 class-attribute instance-attribute

The snapshot consists of a screenshot of the vision module inside SENTIO. This method will also contain the overlays displayed by the vision module but the image resolution will be whatever the current resolution of SENTIO's vision module is.

toSentioAbbr()

Turn the SnapshotType into a string that can be used as a parameter for SENTIO's snap_image command.

SoftwareFence

Bases: Enum

An enumerator holding software fence implementations.

Attributes:

Name	Type	Description
Disabled	0	Fence is disabled.
Round	1	A round fence around the chuck, excluding aux sites.
Rectangle	2	A rectangular fence around the chuck, may include parts of the aux sites.
SoftwareLimit	3	Use software limits on axis. A Large rectangular fence around the chuck motion ares. Collisions with the prober housing are possible (TS-2000; tilted front door)

Stage

Bases: Enum

Represents a stage in SENTIO.

A stage is a piece of hardware that can be controlled by motors and moved in x, y and probably also z direction.

Attributes:

Name	Type	Description
Chuck	0	The chuck stage. This is where the wafer is placed.
Scope	1	The scope stage controls the downward looking microscope. This is an optional stage but it will be present on most probe stations.
Vce	2	First Vce stage. Vce Stages can only be moved in z-direction.
Vce2	3	Second Vce stage. Vce Stages can only be moved in z-direction.
Probe1	4	First motorized probe.
Probe2	5	Second motorized probe.
Probe3	6	Third motorized probe.
Probe4	7	Fourth motorized probe.

StatusBits

List of status codes used by SENTIO.

SENTIO will encode certain status information into the error code variable. This status information does not represent an errors but rather a machine status.

Attributes:

Name	Type	Description
EndOfRoute	1	Stepping reached the end of the route.
LastSite	2	Stepping reached the last site of a die.

SteppingContactMode

Bases: Enum

This mode defines how the chuck behaves during steeping.

Attributes:

Name	Type	Description
BackToContact	0	Chuck will move back to contact position after stepping.
StepToSeparation	1	Chuck will move to separation position after stepping.
LockContact	2	Chuck cannot step when at contact. You will have to manually move it away from its contact position before issuing the next step command.

TestSelection

Bases: Enum

Specifies which dies shall be selected for test.

If a die is selected for test it is activated in the wafer map.

Attributes:

Name	Type	Description
Nothing	0	Select no dies.
Good	1	Select only the good dies.
GoodAndUgly	2	Select only the good dies. Ugly dies are the dies with at least one corner in the edge area of the map. The are completely present on the wafer but may be damaged or have incomplete structures.
GoodUglyAndEdge	3	Good dies are the dies that are completely within the wafer map with no edge lying in the edge area of the map. Ugly dies are the dies with at least one corner in the edge area of the map. The are completely present on the wafer but may be damaged or have incomplete structures. The dies with at leas one edge outside of the wafer are called edge dies. Those dies are incomplete.
All	4	Select all dies for testing.

ThermoChuckState

Bases: Enum

The state of a thermo chuck.

Attributes:

Name	Type	Description
Soaking	0	The chuck is in soaking state,
Cooling	1	The chuck is in cooling state,
Heating	2	The chuck is in heating state,
Uncontrolled	3	The chuck is in uncontrolled state,
Standby	4	The chuck is in standby state,
Error	5	The chuck is in error state,
Controlling	6	The chuck is in controlling state,

VceZReference

Bases: Enum

Reference for Vce z motions.

Attributes:

Name	Type	Description
Zero	0	Use absolute Vce coordinates.
Relative	1	Use coordinates with respect to the current Vce position.

VirtualCarrierInitFlags

Bases: Enum

Flags for initializing a virtual carrier measurement.

Attributes:

Name	Type	Description
Start	0	Start a new virtual carrier measurement.
Continue	1	Continue an existing virtual carrier measurement. If no measurement is running, this will start a new one.

VirtualCarrierStepProcessingState

Bases: Enum

State of a single virtual carrier processing step.

Attributes:

Name	Type	Description
Skip	0	The step is skipped.
Done	1	The step is done.
Ready	2	The step is ready to be executed.

WorkArea

Bases: Enum

An enumeration containing probe station work areas. The OffAxis work area is only present if the specific model of probe station supports it.

Attributes:

Name	Type	Description
Probing	0	The probing work area is the area in which the chuck is under the downward looking microscope. This is where the wafer is probed.
Offaxis	1	The off axis work area is the area in which the chuck is under the off axis camera. This is where off axis ptpa is performed. The wafer cannot be probed here because there is no probe card.

ZPositionHint

Bases: Enum

Represents a hint for the z position of a stage.

Not all values are used by all stages. A scope does not have a contact height and a chuck Hover height may be disabled by SENTIO.

Attributes:

Name	Type	Description
Default	0	Used internally only. Essentially means the value is unset or undefined.
Contact	1	Stage is at contact position.
Hover	2	Stage is at hover position.
Separation	3	Stage is at separation position
Lift	4	Stage is at Lift position.
Transfer	5	Chuck is at transfer position. This is used for the chuck only when the loader is doing a wafer transfer internally.